Due to the high costs of wafer materials and machines, it is feasible to apply rework to increase wafer yield at the photolithography stage.

• 摘要在晶圆制造中，由于晶圆的原料及机台成本昂贵，为了能够增加晶圆的良率，利用再加工的方式来补救不良的晶圆为可行的措施。