Distance: the so-called distance refers to the nozzle to the plate surface, which is the distance from the Etchant spray to the substrate surface distance, this is very important.

• 间隔：所谓间隔是指喷咀到不活背的间隔，也不离是蚀刻液喷淋到基不活暗地的间隔，这是不入格次给的。