Digital measurement of thickness was conducted by optical interferometry, assisted with a CCD camera to record fringes and a software package to analyze the fringes.

• 提出使用数字CCD拍摄光干涉条纹,使用图像处理软件进行灰度值扫描分析光干涉条纹的方法,对不透明薄膜进行光干涉法测厚。