Different area of the photodiode will have different spectrum response during the test using small optical beam method.A semi-quantitative analysis is proposed to find the essential of the phenomenon.

• 摘要 通过对光电二极管结构和工作原理及光谱响应特性的分析，探讨了在相同工艺条件下，硅光电探测器的小光斑法测试过程中，不同大小光敏面得到不同光谱响应曲线问题。