Considering the effect of 3D-substrate heat conduction and the nonuniform filament temperature distribution,the substrate temperature field is more uniform than in pure heat radiation system.

• 在仿真条件下,考虑衬底三维热传导以及热丝温度的不均匀分布使衬底温度场的均匀性明显优于纯热辐射下的温度场。