Comparing with direct ion implantation, the cost of equipment of IBBM is only half or a quarter of that of implanter and the productivity can be increased by 1-2 order.

• 通过对轴承材料(GCr15和Cr4Mo4V)经Cr、N、Ta不同元素的混合处理后；在0.；5M H_2SO_4和0