By applying apparatus for piezoelectric ceramic vibration drilling, the me thod of varying feed rates in vibration drilling is used to drill the micro-hol e .

• 应用压电陶瓷振动台振动钻削装置,采用变进给量振动钻削法加工微小孔,并用工具显微镜对入钻定位误差和出口毛刺进行测量。