By IR,Raman and XPSmeasurements the results indi- cate that these films contain three elements of Si,Ge,and C,and they are clearly composed of Si- C,Si- Ge and Ge- C vibration.

• 通过IR；Raman和XPS的测量结果表明；所制备的薄膜中含有Si；Ge；C3种元素；有较明显的Si-C；Si-Ge；Ge-C键合.