Because of the simplification design of single coil divergent field microwave electron-cyclotron-resonance chemical vapor deposition (MWECR CVD) system, its absorption efficiency of microwave power is not good.

• 由于单磁场线圈微波电子回旋共振化学气相沉积(MWECR CVD)系统设备相对简单,对微波吸收效率不高。