Based on the systematic study and analysis, alight spot scanner photo-current (PC) measurement technique was set up to measure the interface properties of silicon pn junction.

• 摘要通过系统的研究分析，建立了应用光探针的光电(PC)测量方法，应用镜像法和点源产生近似原理建立了物理模型，并进行了系统的理论分析。