Based on the principle of piezoresistance effect,piezoresistive pressure sensor is designed.The temperature compensation is elaborated in detail in zero drift and sensitity drift aspects.

• 根据压阻效应原理设计了一压阻式压力传感器,从零点温度漂移和灵敏度温度漂移2个方面详细论述了传感器的温度补偿问题。