Based on orthogonal experiment, an optimal formulation of polishing bath was obtained. The bath (100 mL) contains 8 g FeCl3, 8 mL HCl, 0.1 mL AEO-9, 0.2 g BTA and 1.2 mL ethanol.

• 采用正交试验；得到最佳化学抛光液配方为:每100mL抛光液中含8g FeCl3；8mL盐酸；0.；1 mLAEO-9；