As a new technology, MEMS (micro electro mechanical system) technology emerged the micro electro technology and precise mechanical processing technology and incorporates micro electro and mechanism.

• 作为一门新兴技术,MEMS(micro electro mechanical system微电子机械系统)技术将微电子技术和精密机械加工技术融合在一起,实现了微电子与机械的一体化。