Approaches to enlarging poly-Si film grain size are discussed,with emphasis on existing optics-based and lithography-based artificial controlled super lateral growth(AC-SLG) methods.

• 主要结合各种基于光束调制和光刻技术的人工控制超级横向生长方法,讨论了获得大晶粒尺寸优质多晶硅薄膜的途径。