After the structure is confirmed, professional sofeware MEMS Pro4.0 is used to design the marks and constitute the fabrication process which adapts to the high g accelerometer.

• 确定加速度计结构尺寸以后；采用MEMS专业软件MEMS Pro4.；0进行了版图设计；制定了适用于高g值加速度计的加工工艺流程。