Abstract: This paper presents the technological design and the process of manufacture of Yb film stress sensor,Which are verified to be feasible by material testing and sensor calibrating in dynamic and static states.

• 文摘:介绍了镱薄膜应力传感器的工艺设计和制造过程，通过传感器的静态、动态标定及材料测试，验证了新的工艺设计和制造过程是正确可行的。