A test method for a new-type molecular/boster pump is introduced in detail so as to analyze its ultimate pressure, oil back-streaming rate, pumping speed and operating frequency.

• 摘要本文详细介绍了新型分子增压泵的测试方法，对分子增压泵的极限真空、返油率、抽速及工作频率等性能进行了测试分析。