A small MEMS component vibration measuring system using heterodyne laser Doppler technology is proposed. The frequency bandwidth is properly determined by analyzing the frequency of Doppler signal.

• 提出了一种MEMS构件微小振动、位移测量系统 ；采用外差法激光多普勒技术 ；通过对信号的频谱分析 ；确定了信号处理单元的适宜频带宽度 .