A numerical approach and a novel analytical solver are used to solve the governing equation of cantilever beam actuated by electrostatic force, and dynamic responses of the cantilever are calculated by mode-superposition.

• 摘要给出了一种静电力作用下微悬臂梁控制方程的数值求解方法，提出了求解该模型的近似解析式和修正解析式，并采用模态叠加法计算微梁的动响应。