A novel micromechanical bend-peas filter is designed and febricated.Its nucleus is an electrothermally excited and piezoresistively detected micromechanical bridge resonator or bridge resonator array.

• 摘要计什制作了一种中心频率可调节的高Q值微机械带通滤波器，其核心部分是一个电热激励／压敏电桥拾振的矽／二氧化矽微桥谐振器或微桥谐振器阵列。