A new monolithic integrated three-axis micromachined gyroscope is designed and tested.It is indicated that the gyroscopes run in expected mode.

• 设计了一种单片集成三轴微机械陀螺,制造了一批样机,进行了初步的驱动特性的实验研究,研制结果表明,陀螺性能符合设计要求。