A new method, called SILAR, for preparation of inorganic compound thin films is introduced.The process is inexpensive and easy to control, and produces films of good quality.

• 摘要介绍了一种新的液相法薄膜制备工艺-SILAR法（连续离子层吸附反应法），该方法设备简单，成本低廉，成膜质量好。