A monolithic silicon multi-sensor on SOI wafer that consists of a three-axis piezoresistive accelerometer, a piezoresistive absolute pressure sensor, and a silicon thermistor temperature sensor is presented.

• 摘要为满足小体积、多参数测量的要求，采用SOI硅片，设计了一种测量三轴加速度、绝对压力、温度参数的单片集成硅微传感器，其中加速度、绝对压力传感器基于掺杂硅压阻效应，温度传感器基于掺杂硅电阻温度效应。