A method to deposit SnO_2 films by plasma CVD is introduced. The sensitivity of thethin film sensors to the LP gas and H_2 together with their mechanism of operation are studied.

• 本文介绍用射频等离子体激活化学汽相淀积SnO_2薄膜的方法；研究了SnO_2薄膜气敏元件对液化石油气和氢气的气敏效应；并对元件的检测机理作了一些探讨.