A local view scan measuring method is adopted, by 10/0.25 micro objective and 3# resolution test pattern (resolution factor is 1.8751p/mm.) . the average measured value of CTF is 0.52 and simulated result is 0.66.

• 在检测过程中，采用局部视场扫描测量方法，选用10/0.；25的显微物镜，3%23鉴别率板(分辨率为1