A intelligentized control system, which was made of PLC,D/A and MFC, was developed to control pushing of the metal cathode source and varying gas composition.

• 研究开发了一套由可编程逻辑控制器 (ProgrammableLogicalControl,PLC)、D/A和质量流量控制器 (MassFlowControl,MFC)组成的智能控制系统 ,控制金属源阴极的推进和气体成分的改变。