A generalzed dynamic equation based on aerosol dynamics and reaction kinetics for a CVD reactor was derived, and a calculation method for particle size distribution and film growth rate in the CVD reactor was developed.

• 基于气溶胶动力学和化学反应动力学,建立了化学气相淀积(CVD)反应器中普适动力学方程,导出了CVD反应器中超细颗粒粒径分布谱函数和薄膜淀积速率的计算方法;