A basic model of sacrificial layer-phosphosilicate-glass (PSG) etching was introduced ,and Power law model was elucidated in details.

• 介绍了在硅微机械加工的牺牲层释放中,氢氟酸(HF)腐蚀磷硅玻璃(PSG)模型的建立过程,详细阐述了Power law模型。