A Study on Raman characteristic spectrum and the intensity of Raman peak is given to pre-sent the microstructure of SIPOS film:The as-deposited films are amorphous and have amor-phous phase of si when its oxygen content changes from 8% to 38%.

• 本文用Raman谱特征和Raman峰强度的变化；揭示掺氧多晶硅(SIPOS)的微结构:对于各种氧含量(从8%25到38%25)的SIPOS生长膜是一种无序结构；其中元素Si呈无定形相.