A 4-DOF microgripper is proposed to achieve micron level position capability. Each finger of the microgripper has 2 DOFs to accomplish Z and Y axes direction motion, respectively.

• 摘要:本文提出一具有四个自由度之微夹爪，其每一指可由压电双层驱动器而分别作出上下及左右之运动，达到多自由及微米精度之需求。