5.According to the industrial develop trend of making the sensor size smaller and smaller, semiconducting type gas sensor for ethonal vapor by using Mems technics was chosen as the study direction.

• 针对近年来在传感器微型化的趋势下的一些研究成果,确定了采用半导体式传感原理制备微型乙醇气体传感器的制作方案。